EZ limo EZSII Series for Clean Room Use
ISO Standard Class 3 Clean Room Level
This product has achieved the ISO Standard Class 3 rating (equivalent to FED Standard Class 1) through reduced dustgenerative properties using grease and improved airtight properties using a stainless sheet.
ISO Standard Class 3:1000 particles or less of 0.1μm particles or more per 1m3 of air.
FED Standard Class 1:Only 1 particle of 0.5μm particles or more per 1 cf (=1 cubic feet) of air.
Utilizes Low Dust-Generative Grease
The bearings for the ball screw, guide and table roller use clean room grease with reduced dust-generative properties.
Linear Slides with Air Couplers for Suction on Either the Left or Right
Air couplers for suction prevent dust from forming on the outside of the linear slide by sucking out dust generated internally.
Left and right joints offer easy installation for your products.